发明名称 SCRIBING UNIT AND SCRIBING APPARATUS FOR PANEL WITH THE UNIT
摘要 PURPOSE: A scribing unit and a scribing apparatus including the same are provided to reduce the change time of a wheel by fixing the right and the left positions of the wheel using a pair of bushes. CONSTITUTION: A plurality of protrusions is formed on one side of A pair of bushes(410). Grooves which corresponds to the protrusions are formed on a wheel(420). The wheel is inserted between the bushes and generates a crack on the surface of a target. A scribing unit includes the bushes and a body(440). The body includes a pair of supporting units(441) which supports the wheel. Through holes are respectively formed on the center of the bushes and the wheel.
申请公布号 KR20100026634(A) 申请公布日期 2010.03.10
申请号 KR20080085711 申请日期 2008.09.01
申请人 SEMES CO., LTD. 发明人 PARK, JUN WOO
分类号 H01L21/301 主分类号 H01L21/301
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