APPARATUS FOR DETECTING WAFER CENTER AND METHOD THEREOF

摘要

PURPOSE: An apparatus and a method for detecting the center of a wafer are provided to calculate the center position of the wafer without an error by detecting and correcting the center of the wafer which is not a round shape. CONSTITUTION: A wafer transfer unit(500) including a robot arm(510) transfers a wafer(600). A pair of wafer sensors(710, 720) detects a first and a second starting points of the wafer and a first and a second ending points of the wafer. One side of the wafer transfer unit is connected to a driving unit(550) which drives the wafer transfer unit. The other side of the wafer transfer unit includes a support unit on which the wafer is settled. The wafer sensors are a light sensor or a laser sensor.