| 摘要 |
PROBLEM TO BE SOLVED: To obtain a focus detection system of an optical sensor capable of quantitatively detecting deviation between an imaging surface of an imaging device in an optical sensor in which the imaging device is incorporated and a focal position of a condensing optical system without using large-sized equipment, and an optical sensor device including the same. SOLUTION: The focus detection system includes: a plane mirror 11a disposed to reflect light from the condensing optical system 5 to the condensing optical system 5; a focus information acquiring device 21A including a pattern plate 25 arranged on a plane including the imaging surface of the imaging device 9 and having a light transmission area in predetermined shape, a light source 24 illuminating the pattern plate 25, and a focus information acquiring means 13 forming an image of the pattern plate 25 on an evaluation surface 15 of the focal position of the condensing optical system 5 and outputting information on the deviation between the imaging surface and the focal position of the condensing optical system 5 by a phase difference detection system; and a microcomputer 20 calculating the deviation between the imaging surface and the focal position of the condensing optical system 5 based on the information on the deviation. COPYRIGHT: (C)2010,JPO&INPIT |
