发明名称 CMP PAD THICKNESS AND PROFILE MONITORING SYSTEM
摘要 In one embodiment a method is provided for maintaining a substrate processing surface. The method generally includes performing a set of measurements on the substrate processing surface, wherein the set of measurements are taken using a displacement sensor coupled to a processing surface conditioning arm, determining a processing surface profile based on the set of measurements, comparing the processing surface profile to a minimum profile threshold, and communicating a result of the profile comparison.
申请公布号 WO2009137764(A3) 申请公布日期 2010.02.25
申请号 WO2009US43288 申请日期 2009.05.08
申请人 APPLIED MATERIALS, INC.;MANENS, ANTOINE, P.;HSU, WEI-YUNG;M'SAAD, HICHEM 发明人 MANENS, ANTOINE, P.;HSU, WEI-YUNG;M'SAAD, HICHEM
分类号 H01L21/304;B24B37/04 主分类号 H01L21/304
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