发明名称 Mask for sequential lateral solidification (SLS) process and a method thereof
摘要 A mask for sequential lateral solidification (SLS) process with at least one transparency region is provided. The transparent region is defined by two lengthwise edges, a front edge, and a rear edge. The two lengthwise edges also define a quadrilateral. The front edge is located outside the quadrilateral, and the rear edge is located inside the quadrilateral.
申请公布号 US7666767(B2) 申请公布日期 2010.02.23
申请号 US20060495517 申请日期 2006.07.31
申请人 AU OPTRONICS CORP. 发明人 SUN MING-WEI
分类号 H01L21/324;C30B1/06;C30B28/02;G03F1/00 主分类号 H01L21/324
代理机构 代理人
主权项
地址