| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To decrease a tilting angle of a mirror. <P>SOLUTION: In this mirror device 2, mirror connecting parts 221a, 221b are, as described above, provided at the side of a movable frame connecting part 211b, that is, a position moved in parallel in the Y direction, so that the mirror rotating axis m does not pass the center G of gravity of a mirror 230. Therefore, the distance between the end of the mirror 230 at the side of a movable frame connecting part 211a and the mirror rotating axis on the mirror rotating axis m is longer than the distance between the end of the mirror 230 at the side of the movable frame connecting part 211b and the mirror rotating axis. Accordingly, when uniform voltage (hereinafter referred to as bias voltage) is applied to electrodes 340a-340d to apply attraction to the mirror 230, as indicated by a dotted line, the mirror 230 is attracted to the movable frame 220 and the base 310 side, and tilted around the mirror rotating axis so that the end at the side of the movable frame connecting part 211a is attracted to the base 310 side. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
