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发明名称
Method and device for measuring impurities in a transparent substrate
摘要
申请公布号
EP1970699(B1)
申请公布日期
2010.02.17
申请号
EP20080102500
申请日期
2008.03.11
申请人
SGS INSTITUT FRESENIUS GMBH
发明人
ASSMUS, UWE;HOESCHLER, BIRGIT;NEROWSKI, BIANCA
分类号
G01N21/90;G01N21/958
主分类号
G01N21/90
代理机构
代理人
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地址
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