LOAD LOCK FOR BATCH TYPE SUBSTRATE

摘要

PURPOSE: A load-lock for conveying a bundle of samples is provided to load a sample by combining a cage and a plate on a load-lock chamber using a vertical transferring cylinder or piston and by alternating atmospheric pressure and creating a vacuum. CONSTITUTION: A load-lock chamber(210) transfers a sample to a processing chamber. A cage(221) and a cage box(220) transfer a laminated sample(201). The cage box includes a vacuum o-ring(222). The sample is loaded by transferring the cage box to the processing chamber through a rotational or linear motion. The cage box is vacuum exhausted after the samples are transferred to the cage box and a load-lock door(211) is closed.