| 摘要 |
A fixing device (60A) for fixing a probe card to a holder (70) by a stiffener (54) comprises a screw member (61) fixed to the holder (70) and locking the probe card in the holder (70) in a vertical direction, a first bearing member (62) placed between a head (61a) of the screw member (61) and the probe card and allowing expansion and contraction of the probe card with respect to the screw member (61) in a horizontal direction, and a second bearing member (63) placed between the probe card and the holder (70) and allowing expansion and contraction of the probe card with respect to the holder (70) in the horizontal direction. In consequence, fluctuation of the probe card caused by thermal expansion or thermal contraction can be released in the horizontal direction, resulting in the reduction of fluctuation in the vertical direction and the reduction of fluctuation of the height of a probe needle tip.
|
