发明名称 COLLOIDAL SILICA, AND METHOD FOR PRODUCTION THEREOF
摘要 Disclosed is a silica particle which is dense and contains metal impurities in less quantities. Specifically disclosed is a colloidal silica produced by using an alkyl silicate as a raw material. When a sample is prepared by adding 1% by weight of polydimethylsilane (as an internal standard) to a dried product of the colloidal silica and solid-stateSi-CP/MAS-NMR spectra are measured on the sample, a peak area ratio as calculated in accordance with the formula: (a peak area for the colloidal silica)/(a peak area for polydimethylsilane) is 15 or less. Also disclosed is a method for producing the colloidal silica.
申请公布号 KR20100015926(A) 申请公布日期 2010.02.12
申请号 KR20097022368 申请日期 2008.03.27
申请人 FUSO CHEMICAL CO., LTD. 发明人 HIGUCHI KAZUAKI
分类号 C01B33/141;C09K3/14;H01L21/304 主分类号 C01B33/141
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