| 摘要 |
PROBLEM TO BE SOLVED: To materialize a measurement system for relatively easily preparing an automatic inspection/measurement program while controlling an inspection tool and a measuring instrument at a high speed. SOLUTION: This measurement system is structured so that an inspecting object is inspected/measured by using the measuring instrument controlled by a programmable controller and the inspection tool. The measuring instrument is mounted with a function of communication with the programmable controller, and a link relay and link register accessible from the programmable controller. COPYRIGHT: (C)2010,JPO&INPIT
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