| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a support jig that holds a substrate with sufficient sucking force without reference to the temperature of an outside environment. <P>SOLUTION: The support jig includes a plate-like base 1 made of metal and a pressure control mechanism 2 provided on the base 1. The pressure control mechanism 2 controls the pressure in a cavity 11. Consequently, the substrate 100 is held with sufficient sucking force without reference to temperature outside the support jig. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
