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发明名称
Verfahren und Vorrichtung zur Messung der Dicke eines dünnen Films auf einem Substrat
摘要
申请公布号
DE602005017960(D1)
申请公布日期
2010.01.14
申请号
DE200560017960T
申请日期
2005.02.23
申请人
DAINIPPON SCREEN MFG. CO. LTD.
发明人
KONO, MOTOHIRO;NAKAZAWA, YOSHIYUKI;KITAJIMA, TOSHIKAZU
分类号
G01B11/06;G01B21/08;H01L21/00;H01L21/66
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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