| 摘要 |
PURPOSE: A probe card with structure for compensating heat-distortion is provided to reduce the thermal strain of the space transformer. CONSTITUTION: The probe card(10) comprises the substrate(11). The substrate (plate) is corresponded to the space transformer. Substrate has conduction hole(113). Conduction holes are arranged between the front side (front surface) and back side of substrate. In this case, conduction holes pass through substrate.
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