申请人 |
MITSUBISHI MATERIALS ELECTRONIC CHEMICALS CO., LTD.;MITSUBISHI MATERIALS CORPORATION;DAI NIPPON TORYO CO., LTD. |
发明人 |
MUROTA, MASAMICHI;UMEDA, HIROTOSHI;IKEDA, HIROSHI;OMURA, KUNIO;MUROUCHI, MASATO;HAYASHI, KENJI;MIZOGUCHI, DAIGOU;MURAKAMI, MASAAKI |