| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processing system, which restricts the effects of transition resume particularly relating to pressure changes of fluids during various types of switching of feedstreams. <P>SOLUTION: The plasma processing system comprises: at least one fluid source 1 for a fluid to be processed, a plasma processing means 8 that enables plasma generation from the fluid to be processed by braking at least a part of chemical bonds of fluid molecules, at least one of multichannel valves 4 placed between the fluid source 1 and the plasma processing means; a means for controlling the multichannel valves 4, which enables to arrange each of multichannel valves 4 at a first position for direct interaction between the fluid source 1 and the plasma processing means 8 or a second position for enabling direct connection of the fluid source 1 to an outlet port 9 of the plasma processing means 8; and at least one device 14 for restricting the flow volume of the fluid, which is located either between the first outlet port 7 of the multichannel valves and an inlet port and/or an outlet port of the plasma processing means or between the second outlet port 12 of the multichannel valves and the outlet port 9 of the plasma processing means. <P>COPYRIGHT: (C)2010,JPO&INPIT |
