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发明名称
REFLECTING OPTICAL SYSTEM
摘要
申请公布号
JPS6147915(A)
申请公布日期
1986.03.08
申请号
JP19840169640
申请日期
1984.08.14
申请人
CANON INC
发明人
HIROSE TAKAMASA
分类号
H01L21/30;C25D1/00;G02B17/00;G03F7/20;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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