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发明名称
HEAT TREATMENT METHOD
摘要
申请公布号
JPH01246818(A)
申请公布日期
1989.10.02
申请号
JP19880073398
申请日期
1988.03.29
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
OMACHI TOKURO;KADOTA YOSHIAKI;OKAMOTO HIROSHI;WATANABE YOSHIO
分类号
H01L21/20;H01L21/205;H01L21/324
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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