发明名称 Dry etching apparatus capable of monitoring motion of WAP ring thereof
摘要 An optical monitoring system includes a ring-shaped object suspended by and engaged with a plurality of vertical plunger shafts. Normally, the vertical plunger shafts move upward and downward reciprocally and coherently, but independently, such that the ring-shaped object ascends or descends horizontally. A light transceiver device is affixed to one vertical plunger shaft. A plurality optical reflector elements are affixed to respective other plunger shafts. A light beam emanated from said light transceiver is reflected by the optical reflector elements and is eventually re-directed back to the light transceiver device.
申请公布号 US7632377(B2) 申请公布日期 2009.12.15
申请号 US20060307106 申请日期 2006.01.24
申请人 UNITED MICROELECTRONICS CORP. 发明人 LAI SHYH-KUEN
分类号 C23F1/00 主分类号 C23F1/00
代理机构 代理人
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