| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating layer structure of low-resistance optical attenuation antireflection which is suitably applied to a semiconductor, optical head, liquid crystal display, cathode-ray tube display, cathode ray tube, blue plate glass, touch sensor, monitor filter, and plastic screen plate coating layer, or the like, and improving the optical transmissivity. <P>SOLUTION: The coating layer structure of the low-resistance optical attenuation antireflection is constituted of a substrate S and a coating layer module M. The coating layer module M is constituted to make a plurality of layers of carbon-silicon compound coating layers mutually laminate, a plurality of layers of aluminum based oxide coating layers, and a plurality of layers of metal coating layers by being formed on the surface of the substrate S. <P>COPYRIGHT: (C)2010,JPO&INPIT |
