| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus hardly causing leakage of produced gas or sublimates, generated by heat treatment accompanying opening and closing of a conversion port. SOLUTION: Four conversion ports 18a-18d are vertically arranged on a front face 13b of a heat treatment chamber 13 comprising the heat treatment apparatus 1. An exhaust port 21 is provided on a bottom face 13a of the heat treatment chamber 13, and an exhaust apparatus 11 is connected to it. In the exhaust apparatus 11, output is enhanced during a period wherein the conversion ports 18c, 18d provided in an upper region X2 are in opened states than during a period wherein the conversion ports 18a, 18b provided in a region X1 in a bottom face 13a side of the heat treatment chamber 13 are in opened states. When the conversion ports 18c, 18d are in the opened states, therefore, a hydrostatic pressure of the region X2 is the same or lower than an outside air pressure Pc, and the leakage of air including the produced gas is prevented. COPYRIGHT: (C)2010,JPO&INPIT
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