| 摘要 |
PROBLEM TO BE SOLVED: To easily manufacture the micro structure of an element for converting a kinetic energy input from the outside into an electric energy. SOLUTION: This micro structure includes a substrate 101, a frame section 102 formed on the substrate, a support section 103, a connection spring section 104, a movable structure 105, a movable electrode section 106, and a fixed electrode section 107 which are disposed on the inside of the frame section 102, and a ceiling section 108 so formed on the frame section 102 as to seal the inside of the frame section 102. The ceiling section 108 supported and formed on the frame section 102 is disposed while being brought into contact with the fixed electrode section 107. COPYRIGHT: (C)2010,JPO&INPIT
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