| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine intended for microfabrication, which can bore a hole having an aspect ratio of 5 or more in a constant diameter and also can achieve boring of a non-through hole. <P>SOLUTION: In the laser beam machining, the non-through hole having a high aspect ratio is bored by technologies of decentering laser beams by making a positional relationship among the base point of decentering, the position of a condensing lens and the focal length of the condensing lens constant, and of eliminating off-scourings generated during laser beam machining. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
