An optical waveguide includes a silicon wafer having two opposed sides. A first notch is defined in each of the two opposed sides such that the silicon wafer includes a head portion and a first stem portion.
申请公布号
WO2009137310(A2)
申请公布日期
2009.11.12
申请号
WO2009US42172
申请日期
2009.04.29
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;FATTAL, DAVID;FIORENTINO, MARCO;XU, QIANFAN