| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an air spindle and its grounding method capable of maintaining high rotation accuracy for long period of time by suppressing generation of vibration and resonance phenomena. Ž<P>SOLUTION: The air spindle is equipped with a housing, a rotary shaft 14 rotatably supported in the housing in a floating state by a hydrostatic bearing, and a grounding mechanism 40 grounding the rotary shaft. The grounding mechanism has an earth pad 42 having conductivity and slidably contacting a shaft end of the rotary shaft, a support arm 44a supporting the earth pad movably along the direction in parallel with an axis of the rotary shaft, and an urging member 46 urging the earth pad toward the shaft end of the rotary shaft. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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