| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a preprocessing method for selectively forming a diffusion layer on the surface of a substrate while preventing a smear or a spread on a pattern after application using an inkjet system. <P>SOLUTION: This preprocessing method includes a step of forming a liquid-repellent layer on a substrate before forming a diffusion layer by selectively applying a diffuser for forming silicon-containing coating using the inkjet system. Such the liquid-repellent layer is preferably formed using a liquid-containing organic silazane compound or a metal compound capable of generating a hydroxyl group by hydrolysis. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
