| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning device for restricting the movable range of the θ direction independently of the movable range of the XY translation direction of a movable plate. <P>SOLUTION: An XYθ stage 1 is a device for positioning the XYθ directions of a semiconductor wafer W mounted on the movable plate 3, and comprises actuators 41x, 43x, and 41y-44y for driving the movable plate 3 in the XYθ directions, and a rotation restricting section 20 for restricting the movable range of the θ direction. The rotation restricting section 20 comprises a cylindrical member 25 that is allowed to translate in the X direction and translate in the Y direction with respect to the movable plate 3 and is linked to the movable plate 3 so as to regulate the rotation movement of the θ direction, and a round bar member 27 that is fixed to a base frame 5 and inserted into the cylindrical member 25 with a clearance between it and the inner wall surface of the cylindrical member 25. <P>COPYRIGHT: (C)2010,JPO&INPIT |
