| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element capable of adjusting the vibration frequency of a vibration arm, and enhancing sensitivity and responsivity. <P>SOLUTION: The angular velocity sensor element 1 pertaining to this embodiment has at least one vibration arm 2b, and a support frame 2 provided with a pair of supporting portions 2a, 2a for fixing both ends of the vibration arm 2b, and expansion/contraction portions 2b which couple the pair of supporting portions 2a, 2a and are capable of expansion and contraction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
