METHOD OF MANUFACTURING PATTERNED BODY BY VACUUM ULTRAVIOLET LIGHT

摘要

PROBLEM TO BE SOLVED: To manufacture a patterned body which has a functional layer accurately decomposed and removed like a precise and complicated pattern by vacuum ultraviolet light, with a high sensitivity.

SOLUTION: A method of manufacturing the patterned body uses a substrate 1 for pattern formation having a functional layer 1b consisting of a functional material capable of being decomposed by irradiation with vacuum ultraviolet light and includes a step of disposing a metal mask 10 on the functional layer and a step of irradiating a surface of the functional layer with vacuum ultraviolet light through the metal mask under the existence of a reactant gas to remove part of the functional layer like a pattern. The metal mask includes a metal thin plate and has a metal mask body 11 having openings 12 and bridges 13 formed so as to bridge the openings, and the bridges are formed so that spaces through which the reactant gas can pass may be formed between the functional layer and the bridges when the metal mask is disposed on the functional layer.

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