发明名称 |
Vibration-type cantilever holder and scanning probe microscope |
摘要 |
A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to the vibrational characteristics of only the cantilever by counteracting additional vibrations.
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申请公布号 |
US7605368(B2) |
申请公布日期 |
2009.10.20 |
申请号 |
US20060595184 |
申请日期 |
2006.11.09 |
申请人 |
SII NANOTECHNOLOGY INC. |
发明人 |
SHIGENO MASATSUGU;IYOKI MASATO |
分类号 |
G01Q60/16;G11B9/00;G01B21/30;G01N23/00;G01Q10/04;G01Q60/24;G01Q60/26;G01Q60/32;G01Q60/38;G01Q70/02;G01Q70/04;G21K7/00 |
主分类号 |
G01Q60/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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