THE CONDUCTIVE NANOMEMBRANE, AND MEMS SENSOR OF USING THE SAME
摘要
The present invention relates to a conductive nanomembrane and a Micro Electro Mechanical System sensor using the same, and more particularly, a conductive nanomembrane that is formed by stacking a polymer electrolyte film and a carbon nanotube layer, and a MEMS sensor using the same.
申请公布号
WO2009123371(A1)
申请公布日期
2009.10.08
申请号
WO2008KR01883
申请日期
2008.04.03
申请人
SEOUL NATIONAL UNIVERSITY INDUSTRY FOUNDATION;KIM, YONG HYUP;LEE, JUNG HOON;KANG, TAE JUNE;JANG, EUI YUN
发明人
KIM, YONG HYUP;LEE, JUNG HOON;KANG, TAE JUNE;JANG, EUI YUN
