| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and device for performing accurate matching, even when there is deformation of some patterns and a magnification error between a template and an SEM image during matching, using the template including a plurality of patterns. <P>SOLUTION: As one method of solving this problem, the method of performing a matching selectively using a part of the plurality of patterns arranged in a predetermined region of design data, and a device for achieving it are provided. As another method of solving the problem, the method of performing a first matching, based on the plurality of patterns arranged in the predetermined region of design data, then performing a second matching using a part of the plurality of patterns arranged in the predetermined region, and a device for achieving it are provided. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
