| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method by which a workpiece quality and the yield can be improved by arranging, between a holding member and a workpiece, a member that has an opening or a notch at a position where a laser beam penetrating the workpiece pass through. <P>SOLUTION: The laser beam machining method includes a main machining stage for cutting a workpiece 3 by laser and a pre-machining stage to be performed before the main machining stage. In the pre-machining stage, there is formed in the pre-machining workpiece 2 an opening 6 that is slightly larger than the machined product portion to be detached from the workpiece in the main machining stage. In the main machining stage, in a state where the pre-machining workpiece 2 cut in the pre-machining stage is positioned and set on a work table 1, the workpiece 3 is placed on the pre-machining workpiece 2, with laser cutting performed on the workpiece 3 based on machining data. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
