发明名称 BARE RETICLE STORAGE CHAMBER AND STOCKER
摘要 <p>A bare reticle storage chamber and stocker (30) includes a reticle input /output -port pod opener (36) for: 1. accessing a reticle (68) carried within a pod; while 2. maintaining a clean environment around the reticle (68). A reticle transfer area (42) that abuts the pod opener (30) and houses a reticle handling robot (44) that includes an end-effector (162) adapted for receiving and retaining at least one reticle (68). A bare reticle storage chamber (52) also abuts the reticle transfer area (42). The reticle storage chamber (52) houses: 1. a reticle cabinet (62) having reticle storage slots (64) that receive reticles (68); and 2. a plenum (102) that provides a flow of gas about and through the reticle cabinet (62). Abutting the reticle transfer area (42), the reticle storage chamber (52) has an openable and closeable robot access door (74) through which the end-effector (162) of the reticle handling robot (44) accesses the reticle storage slot that is then juxtaposed with the robot access door (74).</p>
申请公布号 WO2009114193(A2) 申请公布日期 2009.09.17
申请号 WO2009US01630 申请日期 2009.03.13
申请人 FORTREND ENGINEERING CORPORATION;WU, KUNG, CHRIS;MORGAN, RICHARD;HUANG, YUAN-YU;LIU, SHIH-CHI;CHANG, WEI-SHIANG;KO, HUNG-KUN 发明人 WU, KUNG, CHRIS;MORGAN, RICHARD;HUANG, YUAN-YU;LIU, SHIH-CHI;CHANG, WEI-SHIANG;KO, HUNG-KUN
分类号 B65B55/20 主分类号 B65B55/20
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