| 摘要 |
PROBLEM TO BE SOLVED: To provide an easily-manufacturable micro-sample handling device can handle a micron-size sample surely, quickly, and simply without requiting a skill. SOLUTION: A pair of arms 12a, 12b extending from a base part 11 approximately in parallel at a prescribed distance, a body member having a pair of arm chip parts 13a, 13b extending in the mutually approaching directions from each of the pair of arms, a groove where a shape memory alloy wire is laid and a conductive film for fixing the wire are manufactured in a semiconductor process, and the shape memory alloy wire is energized and contracted, to thereby close the arm chip parts 13a, 13b. COPYRIGHT: (C)2009,JPO&INPIT
|
