METHOD FOR MANUFACTURING SHOWER PLATE, SHOWER PLATE MANUFACTURED USING THE METHOD, AND PLASMA PROCESSING APPARATUS INCLUDING THE SHOWER PLATE

摘要

A manufacturing method of a shower plate, a shower plate, and a plasma processing apparatus are provided to stably supply a plasma excitation gas by preventing a back flow of plasma. A porous gas ventilation body(11) of a pillar shape is formed by a porous material. A fine member(12) of a cylindrical shape is formed by material which does not pass a gas. A porous piece body(13) is formed. The porous piece body is sintered at a first temperature. A concave part(10) is formed in a surface which faces plasma of a dielectric plate which is a main body of a shower plate. A gas flow channel(14) is formed from a bottom surface of the concave part, and passes through the dielectric plate.