发明名称 Vorgefertigte Platte und Verfahren zum Herrichten eines Verdampferkörpers und dessen Betreiben in einer PVD-Metallisierungsanlage
摘要 Preparing and operating a vaporizer body in a PVD-metallization system for continuously supplying and vaporizing metal. A layer structure deposited onto the vaporizer body comprising sinterable powder material in a substantially unsintered state, to which the metal is supplied, is deposited as a raw layer structure onto the vaporizer body and sintered onto the same in the metallization cycle by heating the vaporizer body. The layer structure is consumable during the metallization process and can be replaced directly in the metallization system after each metallization cycle.
申请公布号 DE102004045206(B4) 申请公布日期 2009.09.10
申请号 DE20041045206 申请日期 2004.09.17
申请人 SINTEC KERAMIK GMBH 发明人 NUERNBERGER, MICHAEL;MAIZINGER, RUDOLF;GOETZ, ULRICH
分类号 C23C14/24;C23C14/14 主分类号 C23C14/24
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