CRYSTALLIZATION METHOD OF AMORPHOUS LAYER AND THIN FILM SOLAR CELL AND FABRICATION METHOD OF THE CELL ADOPTING THE CRYSTALLIZATION METHOD

摘要

A crystallization method of an amorphous layer, and a thin film solar cell and fabrication method of the cell adopting the crystallization method are provided to be manufactured simply at a low coast by efficiently crystallizing an amorphous layer. A heat-radiating layer(21) is formed on a substrate(10), wherein the heat-radiating layer is distanced from the substrate through a suspending structure. An amorphous layer(20) is formed on the heat-radiating layer, and the amorphous layer is heated by applying voltage to the heat-radiating layer. The amorphous layer is crystallized by the heat from the heat-radiating layer, and is made of a semiconductor material. The semiconductor material is made of one of Si and Ge.