| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide technology for more correctly evaluating image formation characteristics of a projection optical system. <P>SOLUTION: An evaluation method for evaluating the image formation characteristics of the projection optical system includes an expression step (S1) of expressing a polarization state in a pupil of an illumination optical system as a numerical value, an assumption step (S2) of virtually dividing the pupil of the illumination optical system into a plurality of partial regions, assuming one polarization state for the whole of each partial region based on the polarization state expressed as the numerical value in the expression step and assuming individual polarization states respectively for the plurality of regions, and a calculation step (S3) of calculating the image formation characteristics of the projection optical system under such conditions that the plurality of partial regions have the polarization states individually assumed in the assumption step. <P>COPYRIGHT: (C)2009,JPO&INPIT |
