METHODS FOR THE FABRICATION OF GAS SENSORS WITH THE CHANNELS OF NANO-POWDERS NECKED BY SINTERING

摘要

A gas sensor manufacturing method using the nano powder connected by sintering is provided to maximize the change of the conductivity and to form a total depletion and a channel by controlling the size of the nano powder. A gas sensor manufacturing method using the nano powder comprises followings. An insulating layer, a heater layer, and an electrode layer are successively formed on a substrate upside. The nanopowder is coated uniformly on the electrode layer. The coated nanopowders are necked by sintering. The electrode layer is formed on the necked nanopowder. The substrate is electrically insulated. The electrode layer is formed owing to a thermal evaporation method or the sputtering method. The nanopowders is several sintered at the higher than 100‹C for several second after being coated on the electrode.