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发明名称
EXPOSURE APPARATUS FOR LIQUID CRYSTAL PANEL AND EXPOSURE APPARATUS
摘要
申请公布号
EP1602978(A4)
申请公布日期
2009.08.19
申请号
EP20040710494
申请日期
2004.02.12
申请人
NIHON CERATEC CO., LTD.;OHMI, TADAHIRO
发明人
TAKEHISA, KIWAMU;MORIYAMA, SHIROU;SAKAMAKI, MAKOTO;OHMI, TADAHIRO
分类号
G02F1/13;C04B35/565;C04B35/584;C04B38/00;G02F1/1343;G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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