发明名称 THE METHOD FOR MANUFACTURING ELECTRODE OF ORGANIC ELECTROLUMINESCENCE DEVICE USING CHEMICAL VAPOR DEPOSITION
摘要 <p>A method for manufacturing an electrode of an organic electroluminescent device is provided to rapidly form an electrode on a substrate of large area without damage to an organic thin film by using a chemical vapor deposition method. An organic electroluminescent device includes a first electrode(2), an organic thin film(3), an electron injection layer(4), and a second electrode(5). The first electrode is formed on a substrate(1). The organic thin film and the electron injection layer are formed on the first electrode. The second electrode is formed on the organic thin film. The second electrode is formed by a chemical vapor deposition method at a process temperature less than 200 degree. The second electrode is made of aluminum, barium, zinc, silver, magnesium, calcium, and oxide conductor having a high electron injection property.</p>
申请公布号 KR20090085238(A) 申请公布日期 2009.08.07
申请号 KR20080011033 申请日期 2008.02.04
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LEE, JEONG IK;CHU, HYE YONG;LEE, JONG HEE
分类号 H05B33/26;C23C16/06;H01L51/50 主分类号 H05B33/26
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