| 摘要 |
A sample stage is provided with first to fourth plates. Each of the first to fourth plates has a first side surface and a second side surface. The first and the second side surfaces are adjacent to each other. The first and the second side surfaces extend perpendicularly to each other. The second side surface of the second plate is in contact with the first side surface of the first plate. The second side surface of the third plate is in contact with the first side surface of the second plate. The second side surface of the fourth plate is in contact with the first side surface of the third plate. The second side surface of the first plate is in contact with the first side surface of the fourth plate. A first rectangular opening is formed by the first side surfaces of the first to fourth plates.
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