发明名称 SENSOR ELEMENT HAVING AT LEAST ONE MEASUREMENT ELEMENT WITH PIEZOELECTRIC AND PYROELECTRIC PROPERTIES
摘要 <p>A sensor element (1) has at least one measurement element (2) with piezoelectric and pyroelectric properties, and measurement electrodes (3). A measurement variable and a disturbance variable act simultaneously upon the at least one measurement element (2) and the measurement signal derived from the measurement electrodes (3) includes an interference signal. The sensor element (1) has at least one compensation element (4, 4') upon which only the disturbance variable acts, so that a correction signal used to compensate for the interference signal in the measurement signal can be derived from the compensation element (4, 4'). The invention consists in that the compensation element (4, 4') is in thermal contact with a first support (10) and with a second support (11) of the measurement element (2), or with the measurement element (2), over its length between the supports (10, 11), so that substantially the same temperature field is established in the measurement element (2) and in the compensation element (4, 4').</p>
申请公布号 EP1797603(B1) 申请公布日期 2009.08.05
申请号 EP20050790304 申请日期 2005.10.07
申请人 PIEZOCRYST ADVANCED SENSORICS GMBH 发明人 GLASER, JOSEF;KROEGER, DIETMAR;LEUPRECHT, GERNOT;REITER, CHRISTIAN
分类号 H01L41/113;G01L1/16;G01L9/08;G01P15/09 主分类号 H01L41/113
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