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发明名称
摘要
申请公布号	JP4303389(B2)	申请公布日期	2009.07.29
申请号	JP20000047782	申请日期	2000.02.24
申请人		发明人
分类号	H01L21/8247;H01L27/10;H01L21/28;H01L21/336;H01L21/8246;H01L27/115;H01L29/788;H01L29/792	主分类号	H01L21/8247
代理机构		代理人
主权项
地址

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