PHASE CHANGE TYPE MEMORY DEVICE AND FABRICATING METHOD THEREOF

摘要

A phase change memory device and a manufacturing method thereof for increasing operation stability and reliability are provided to increase the phase change memory device and distribution character of the set state resistance value. A phase change memory device comprises a phase change material layer(22). The phase change material layer is comprised of the germanium-antimony-tellurium system. The composition of the antimony added to the Ge2Sb2+xTe5 comprising the phase change material layer to the excess of quantity is 0.12~0.32. As to the Ge2Sb2+xTe5 comprising the phase change material layer, the structure of the crystalline state is comprised of the hcp single phase.