AEROGEL-BASED MOLD FOR MEMS FABRICATION AND FORMATION THEREOF

摘要

An aerogel-based mold for MEMS fabrication and formation is provided to reduce time to manufacture a micro electric machine characteristic part by reducing time to form a patterned material layer. An aerogel-based mold for MEMS fabrication and formation comprises an aerogel layer(11). The aerogel layer approximately has the thickness of 10 nm ~ 1 mm. The aerogel layer has a structural characteristic part having the same surface contour with a partial surface contour of a micro electric machine characteristic part and is evaporated on a substrate.