| 摘要 |
A method for detecting defects using the comparison of optical image contours is provided to detect the non-formation deformity of the contact hole pattern by comparing the contours of the contact hole pattern image obtained from the two check fields. An image of patterns within two check fields is obtained. The color level of image pixels(103,105,107) is recognized and the pixel more than the standard value is selected. Contours(201,203) of pattern image are calculated by connecting the selected pixels. The contours of pattern image of two check fields are compared, and then the deformity is detected. In the step of obtaining the image contour of the pattern, the pixels which are adjacent to each other and have value greater than the standard are connected.
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