| 摘要 |
A method of fabricating a semiconductor device comprising forming a metal layer on a semiconductor substrate, patterning the metal layer to form a plurality of metal wires having side surfaces, forming spacers on both side surfaces of each of the metal wires, and forming an insulating layer between the spacers of the adjacent metal wires, the insulating layer having voids formed therein and being formed with material having a dielectric constant which differs from that of the spacers, and a semiconductor device made by this method. |
