发明名称 |
A SHOWER HEAD FOR MANUFACTURING CARBON NANO TUBE |
摘要 |
A shower head for fabricating a carbon nano tube is provided to increase the coupling efficiency of carbon nanotube by spraying the mixing gas of source gas and reaction gas onto a substrate. A porous plate(25) comprises a plurality of raw material gas injection pipes(16) and reaction gas injection nozzles(26) in order to spray the source gas and the reaction gas adjacent to each other. A mixing injection chamber(35) is connected with the raw material gas injection pipe and the reaction gas injection nozzle. The second porous plate in which the mixing injection chamber is formed is joined with the lower part of the porous plate. The mixing injection chamber in the second porous plate is separated into plural. The mixing injection chamber comprises a mixing box(32) and a mixing gas injection nozzle(33). The mixing box is formed in the top unit of the second porous plate into the constant depth. The mixing gas injection nozzle penetrates the bottom surface of the mixing box.
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申请公布号 |
KR20090071729(A) |
申请公布日期 |
2009.07.02 |
申请号 |
KR20070139607 |
申请日期 |
2007.12.28 |
申请人 |
DMS CO., LTD. |
发明人 |
KIM, WOO SAM;PARK, CHUN SEONG |
分类号 |
H01L21/205 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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